Beam Lithography (beam + lithography)

Distribution by Scientific Domains

Kinds of Beam Lithography

  • electron beam lithography


  • Selected Abstracts


    Patterned Synthesis of Pd4S: Chemically Robust Electrodes and Conducting Etch Masks

    ADVANCED FUNCTIONAL MATERIALS, Issue 6 2010
    Boya Radha
    Abstract A simple, one-step process to synthesize Pd4S films is reported here along with their characterization using X-ray diffraction, electron microscopy, and electrical measurements. The synthesis involves thermolysis of a single-source precursor, namely palladium alkanethiolate, in H2 atmosphere at 250,°C for 3,h. The films are highly conducting and resistant to strong acidic, alkali, and oxidizing environments. The precursor allows patterning of the Pd4S films by electron beam lithography and micromolding, an attribute that has been employed in making chemically resistant electrodes and etch masks. The conversion of palladium thiolate to other sulfide phases is also achieved. [source]


    High-Performance Photoresponsive Organic Nanotransistors with Single-Layer Graphenes as Two-Dimensional Electrodes

    ADVANCED FUNCTIONAL MATERIALS, Issue 17 2009
    Yang Cao
    Abstract Graphene behaves as a robust semimetal with the high electrical conductivity stemming from its high-quality tight two-dimensional crystallographic lattice. It is therefore a promising electrode material. Here, a general methodology for making stable photoresponsive field effect transistors, whose device geometries are comparable to traditional macroscopic semiconducting devices at the nanometer scale, using cut graphene sheets as 2D contacts is detailed. These contacts are produced through oxidative cutting of individual 2D planar graphene by electron beam lithography and oxygen plasma etching. Nanoscale organic transistors based on graphene contacts show high-performance FET behavior with bulk-like carrier mobility, high on/off current ratio, and high reproducibility. Due to the presence of photoactive molecules, the devices display reversible changes in current when they are exposed to visible light. The calculated responsivity of the devices is found to be as high as ,8.3,A,W,1. This study forms the basis for making new types of ultrasensitive molecular devices, thus initiating broad research interest in the field of nanoscale/molecular electronics. [source]


    Regulation of implant surface cell adhesion: characterization and quantification of S-phase primary osteoblast adhesions on biomimetic nanoscale substrates

    JOURNAL OF ORTHOPAEDIC RESEARCH, Issue 2 2007
    Manus J.P. Biggs
    Abstract Integration of an orthopedic prosthesis for bone repair must be associated with osseointegration and implant fixation, an ideal that can be approached via topographical modification of the implant/bone interface. It is thought that osteoblasts use cellular extensions to gather spatial information of the topographical surroundings prior to adhesion formation and cellular flattening. Focal adhesions (FAs) are dynamic structures associated with the actin cytoskeleton that form adhesion plaques of clustered integrin receptors that function in coupling the cell cytoskeleton to the extracellular matrix (ECM). FAs contain structural and signalling molecules crucial to cell adhesion and survival. To investigate the effects of ordered nanotopographies on osteoblast adhesion formation, primary human osteoblasts (HOBs) were cultured on experimental substrates possessing a defined array of nanoscale pits. Nickel shims of controlled nanopit dimension and configuration were fabricated by electron beam lithography and transferred to polycarbonate (PC) discs via injection molding. Nanopits measuring 120 nm diameter and 100 nm in depth with 300 nm center,center spacing were fabricated in three unique geometric conformations: square, hexagonal, and near-square (300 nm spaced pits in square pattern, but with ±50 nm disorder). Immunofluorescent labeling of vinculin allowed HOB adhesion complexes to be visualized and quantified by image software. Perhipheral adhesions as well as those within the perinuclear region were observed, and adhesion length and number were seen to vary on nanopit substrates relative to smooth PC. S-phase cells on experimental substrates were identified with bromodeoxyuridine (BrdU) immunofluorescent detection, allowing adhesion quantification to be conducted on a uniform flattened population of cells within the S-phase of the cell cycle. Findings of this study demonstrate the disruptive effects of ordered nanopits on adhesion formation and the role the conformation of nanofeatures plays in modulating these effects. Highly ordered arrays of nanopits resulted in decreased adhesion formation and a reduction in adhesion length, while introducing a degree of controlled disorder present in near-square arrays, was shown to increase focal adhesion formation and size. HOBs were also shown to be affected morphologicaly by the presence and conformation of nanopits. Ordered arrays affected cellular spreading, and induced an elongated cellular phenotype, indicative of increased motility, while near-square nanopit symmetries induced HOB spreading. It is postulated that nanopits affect osteoblast,substrate adhesion by directly or indirectly affecting adhesion complex formation, a phenomenon dependent on nanopit dimension and conformation. © 2006 Orthopaedic Research Society. Published by Wiley Periodicals, Inc. J Orthop Res 25:273,282, 2007 [source]


    Nanostructured gold surfaces as reproducible substrates for surface-enhanced Raman spectroscopy

    JOURNAL OF RAMAN SPECTROSCOPY, Issue 3 2007
    M. Sackmann
    Abstract Raman spectroscopy is a common tool for the qualitative and quantitative chemical analysis of molecules. Although the unique identification of molecules is possible via their vibrational lines, high concentrations (mmol/l) are needed for their nonresonant excitation owing to their low scattering cross section. The intensity of the Raman spectra is amplified by the use of the surface-enhanced Raman scattering (SERS) technique. While the use of silver sols results only in a limited reproducibility of the Raman line intensities, lithographically designed, nanostructured gold surfaces used as SERS-active substrates should, in principle, combine the high sensitivity with better reproducibility. For this purpose, we have produced gratings of gold dots on Si(001) surfaces by means of electron beam lithography. Qualitative and quantitative investigations of crystal violet (CV) performed using nanostructured surfaces give high reproducibility and enhancement of the Raman lines. The substrates are reusable after cleaning; all results presented could be obtained from a single SERS substrate. For the experiments very low laser powers were used. Copyright © 2006 John Wiley & Sons, Ltd. [source]


    Spectral characteristics of single InAs/InGaAs quantum dots in a quantum well

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 4 2003
    L. Worschech
    Abstract Self assembled InAs quantum dots embedded in an InGaAs quantum well were grown by molecular beam epitaxy. At room temperature these dots in a well (DWELLS) have an emission wavelength of 1.3,,m. Small mesas with lateral sizes down to 200 × 200 nm2 were fabricated by electron beam lithography and etching techniques. By photoluminescence spectroscopy at low temperatures we observe narrow lines, which we attribute to excitons and excitonic molecules. Biexciton binding energies ranging between 3.5,5,meV are found. [source]


    Diffractive CIE 1931 chromaticity diagram

    COLOR RESEARCH & APPLICATION, Issue 5 2007
    Joni Orava
    Abstract A novel diffractive CIE 1931 chromaticity diagram is generated by utilizing surface relief gratings on a plastic sample. A properly illuminated sample is shown to reflect the CIE chromaticity diagram with exact colors and large gamut. Additive color mixing is accomplished by utilizing the four main peaks of a 4000 K fluorescent lamp's spectrum as the primary colors. The primary grating units are reflecting the combination of the primary colors to the desired viewing angle and thereby forming the correct chromaticity (x, y) at each pixel of chromaticity diagram. Weights of primary colors at each pixel of the diagram are controlled by fixing the relative areas of the primary gratings. The master grating is fabricated with aid of electron beam lithography. The final grating is hot embossed on a polycarbonate sample using an electroplated nickel shim. Chromaticity values are measured from the plastic sample by a spectroradiometer. © 2007 Wiley Periodicals, Inc. Col Res Appl, 32, 409,413, 2007 [source]