Dioxide Thin Films (dioxide + thin_film)

Distribution by Scientific Domains


Selected Abstracts


Synthesis and Characterization of Nanostructured Cerium Dioxide Thin Films Deposited by Ultrasonic Spray Pyrolysis

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, Issue 1 2010
Mario F. García-Sánchez
Nanostructured thin films of cerium dioxide have been prepared on single-crystalline silicon substrates by ultrasonic spray pyrolysis using cerium acetylacetonate as a metal,organic precursor dissolved in anhydrous methanol and acetic acid as an additive. The morphology, structure, optical index, and electrical properties were studied by X-ray diffraction, scanning electron microscopy, atomic force microscopy, ellipsometry, and impedance spectroscopy. The use of additives is very important to obtain crack-free films. The substrate temperature and flow rate was optimized for obtaining smooth (Ra<0.4 nm), dense (n>2), and homogeneous nanocrystalline films with grain sizes as small as 10 nm. The influence of thermal annealing on the structural properties of films was studied. The low activation energy calculated for total conductivity (0.133 eV) is attributed to the nanometric size of the grains. [source]


Growth of Hafnium Dioxide Thin Films by MOCVD Using a New Series of Cyclopentadienyl Hafnium Compounds,

CHEMICAL VAPOR DEPOSITION, Issue 11 2007
G. Carta
Abstract Thin films of HfO2 are grown by metal-organic (MO)CVD on Si(001) and fused quartz substrates in the temperature range 400,500,°C, using a new series of bis-cyclopentadienyl bis-amino-alkoxide hafnium precursors, namely [(C5H5)2Hf{OC(CH3)2CH2N(CH3)2}2] and [(C5H5)2Hf{OCH(CH3)CH2N(CH3)2}2], stable in air because of their strong coordination to the metal center. The films obtained are investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectroscopy (RBS), and atomic force microscopy (AFM). Monoclinic phase HfO2 (baddeleyite) films, characterized by a correct stoichiometric ratio and a granular surface morphology with a roughness/thickness ratio that decreases with increasing deposition rate, are obtained. [source]


Effect of annealing on the structural, electrical and optical properties of nanostructured TiO2 thin films

CRYSTAL RESEARCH AND TECHNOLOGY, Issue 9 2009
S. Sankar
Abstract Nanostructured titanium dioxide thin films were prepared using reactive pulsed laser ablation technique. Effects of annealing on the structural, morphological, electrical and optical properties are discussed. The structural, electrical and optical properties of TiO2 films are found to be sensitive to annealing temperature and are described with GIXRD, SEM, AFM, UV-Visible spectroscopy and electrical studies. X-ray diffraction studies showed that the as-deposited films were amorphous and at first changed to anatase and then to rutile phase with increase of annealing temperature. Optical constants of these films were derived from the transmission spectra and the refractive index dispersion of the films, subjected to annealing at different temperatures, is discussed in terms of the single oscillator-Wemple and Didomenico model. (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


Photoelectrical properties of crystalline titanium dioxide thin films after thermo-annealing

CRYSTAL RESEARCH AND TECHNOLOGY, Issue 5 2007
R. Sathyamoorthy
Abstract This paper reports the photoelectrical properties of sol gel derived titanium dioxide (TiO2) thin films annealed at different temperatures (425-900°C). The structure of the as-grown film was found to be amorphous and it transforms to crystalline upon annealing. The trap levels are studied by thermally stimulated current (TSC) measurements. A single trap level with activation energy of 1.5 eV was identified. The steady state and transient photocurrent was measured and the results are discussed on the basis of structural transformation. The photocurrent was found to be maximum for the films annealed at 425°C and further it decreases with annealing at higher temperatures. The photoconduction parameters such as carrier lifetime, lifetime decay constant and photosensitivity were calculated and the results are discussed as a function of annealing temperature. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


Optimization of Cr8O21 targets for Pulsed Laser Deposition

CRYSTAL RESEARCH AND TECHNOLOGY, Issue 12 2005
L. Tortet
Abstract This work describes the preparation of Cr8O21 pellets with optimised mass density to be used as targets for Pulsed Laser Deposition (PLD) of chromium dioxide thin films. Cr8O21 is synthesised by thermal decomposition of CrO3, at 270 °C. An attempt to reduce the grain size of the Cr8O21 powder to the nanometer scale has been made in order to increase the density of the pressed and sintered pellets serving as targets. The morphology of those starting fine powders as well as of targets (before and after laser ablation) and the corresponding thin films were characterized and studied using X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and Raman spectroscopy. The composition of the films is a mixture of crystallised Cr2O3 and amorphous CrO2. (© 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


Titanium dioxide thin films deposited by the sol-gel technique starting from titanium oxy-acetyl acetonate: gas sensing and photocatalyst applications

PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 9 2010
A. Maldonado
Abstract Titanium dioxide (TiO2) thin films were deposited onto sodocalcic glass plates by the sol-gel technique, starting from a non-alkoxide route, namely, titanium oxy-acetyl acetonate as Ti precursor. Film thickness effect on both the gas sensing and photocatalytic degradation performance was studied. The as-deposited films were annealed in air at 400 °C. All the X-ray spectra of the films show a very broad-peak centered in a 2, angle around 30°. In the case of the thinnest films the surface morphology is uniform and very smooth, whereas for the thickest films the corresponding surface is covered by grains with a rod-like shape with a length on the order of 140 nm. The films were tested both for two straightforward applications: ultraviolet assisted-degradation of methylene blue dissolved in water, at different times, as well as gas sensor in a controlled propane (C3H8) atmosphere. As the film thickness increases, the degradation of methylene blue (MB) also increases. The thickest TiO2 thin films after being exposed by 5 hours to the catalytic degradation, promoted by ultraviolet illumination, showed a final MB solution degradation in the order of 48%. This reult can be associated with the increase in the effective exposed area of the TiO2 thin films. On the other hand, the exposition of the films to a controlled propane atmosphere produced a significant change in the surface electrical resistance of the films at operating temperatures of 200 °C and above. In fact, in the case of the thickest TiO2 films, a dramatic electrical resistance change of non-exposed and propane exposed , 560 to 0.7 M, ,, was registered. The results show that TiO2 films deposited by an economical deposition technique, as is the case of the sol-gel technique, could have an important potential in industrial applications. (© 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


Deposition of SiO, -Like Thin Films from a Mixture of HMDSO and Oxygen by Low Pressure and DBD Discharges to Improve the Corrosion Behaviour of Steel

PLASMA PROCESSES AND POLYMERS, Issue S1 2007
Camille Petit-Etienne
Abstract Hexamethyldisiloxane was used to deposit silicon dioxide thin films using a low frequency plasma reactor at low pressure as well as a dielectric barrier discharge (DBD) at atmospheric pressure. FT-IR, XPS, EIS, SEM and ellipsometry were used to analyse the samples. The results show that, at low pressure, the deposited films which are smooth, continuous and dense present a polymer-like structure. By carrying out the film deposition after an oxygen plasma pretreatment step, a further improvement in the protective properties is achieved, which is observed in the case of SiO, coatings with 13.56 MHz RF generators.1 At atmospheric pressure, the deposited films present an inorganic character deposited in open air and a polymer-like one deposited under a controlled nitrogen atmosphere in our DBD reactor. The latter also allows continuous films which present the best anti-corrosive properties (which have been studied for the first time for anti-corrosive properties) when they contain some carbon incorporated. [source]