Vapor Phase Epitaxy (vapor + phase_epitaxy)

Distribution by Scientific Domains

Kinds of Vapor Phase Epitaxy

  • hydride vapor phase epitaxy
  • metal organic vapor phase epitaxy
  • metal-organic vapor phase epitaxy
  • metalorganic vapor phase epitaxy
  • organic vapor phase epitaxy


  • Selected Abstracts


    Bulk growth of gallium nitride: challenges and difficulties

    CRYSTAL RESEARCH AND TECHNOLOGY, Issue 12 2007
    M. Bockowski
    Abstract The present status of the GaN bulk growth by High Pressure Solution (HPS) method and combination of HPS and Hydride Vapor Phase Epitaxy (HVPE) methods is reviewed. Up to now the spontaneous high pressure solution growth of GaN results in crystals having habit of hexagonal platelets of surface area of 3 cm2 or needles with length up to 1 cm. Recently, the platelets and needles have been used as seeds for the HVPE growth. On the other hand, the LPE technique under pressure with pressure-grown GaN (hp-GaN), GaN/sapphire template, patterned GaN/sapphire template and free standing HVPE GaN as seeds has been examined and developed. ( 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Development of InN metalorganic vapor phase epitaxy using in-situ spectroscopic ellipsometry

    CRYSTAL RESEARCH AND TECHNOLOGY, Issue 10-11 2005
    M. Drago
    Abstract Metalorganic vapor phase epitaxy of InN layers on sapphire was studied in-situ by spectroscopic ellipsometry (SE), ex-situ atomic force microscopy and optical microscopy. Surface morphology has been largely improved by using nitrogen instead of hydrogen as carrier gas during sapphire nitridation. Using the sensitivity of in-situ SE with respect to roughness we established a new growth procedure with low V/III ratio (104) at high temperature (580 C) and growth rates as high as 350 nm/h, leading to improved electronic layer properties and allowing for growth of comparably thick layers. ( 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    MOVPE growth and characterization of a -plane AlGaN over the entire composition range

    PHYSICA STATUS SOLIDI - RAPID RESEARCH LETTERS, Issue 7 2010
    Masihhur R. Laskar
    Abstract We report the metal organic vapor phase epitaxy (MOVPE) growth and characterization of non-polar (110) a -plane Alx Ga1,xN on (102) r -plane sapphire substrates over the entire composition range. Alx Ga1,xN samples with ,0.8 ,m thick layers and with x = 0, 0.18, 0.38, 0.46, 0.66, and 1.0 have been grown on r -plane sapphire substrates. The layer quality can be improved by using a 3-stage AlN nucleation layer and appropriate V/III ratio switching following nucleation. All a -plane AlGaN epilayers show an anisotropic in-plane mosaicity, strongly influenced by Al incorporation and growth conditions. Careful lattice parameter measurements show anisotropic in-plane strain that results in an orthorhombic distortion of the hexagonal unit cell, making Al composition determination from X-ray diffraction difficult. In general lower Al incorporation is seen in a -plane epilayers compared to c -plane samples grown under the same conditions. ( 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Optimization of homoepitaxially grown AlGaN/GaN heterostructures

    PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Issue 10 2010
    J. A. Grenko
    Abstract We report on the growth of Al0.25Ga0.75N/GaN heterostructures on low dislocation density semi-insulating c -axis GaN substrates by metalorganic vapor phase epitaxy (MOVPE). A room temperature (RT) Hall mobility (RT) up to 2065,cm2,V,1,s,1 at sheet density (ns) of 8.25,,1012,cm,2 has been measured. This work compliments prior studies in which we observed a buffer-induced modulation of the RT two-dimensional electron gas (2DEG) ns and RT by varying the GaN buffer layer thickness. Here, we focus on the optimization of the heterostructure 2DEG properties by elimination of silicon doping in the Al0.25Ga0.75N barrier and unintentional Al in the not-intentionally doped (n.i.d.) GaN buffer layer. The 15% improvement in RT and ns relative to previous results is consistent with those predicted by Poisson solver calculations. Use of thick GaN buffers has minimized the theoretical mobility reduction based on intersubband scattering and has enabled us to determine the 2DEG sheet density associated with the polarization field () to be ,5,,1012,cm,2. [source]


    AlInN HEMT grown on SiC by metalorganic vapor phase epitaxy for millimeter-wave applications

    PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Issue 6 2010
    Shiping Guo
    Abstract In this work we present the epitaxial and device results of AlInN/GaN HEMTs grown on SiC by metalorganic vapor phase epitaxy. High quality AlInN/GaN HEMT structures with sub-10,nm AlInN barrier were grown with very low Ga background level (<1%). The low Rsh of 215,,/sq was obtained with an excellent standard deviation of 1.1% across 3, wafers. Lehighton RT contactless Hall tests show a high mobility of 1617,cm2/V,s and sheet charge density of 1.76,,1013/cm2. DC characteristics of an AlInN/GaN HEMT with a gate length of 0.1,m and 25,nm Al2O3 passivation show maximum drain current (IDS,max) of 2.36,A/mm at VGS,=,2,V. Gate recessed devices with 0.15,m gate length and 25,nm Al2O3 passivation resulted in maximum transconductance (gm) of 675,mS/mm, the highest value ever reported in AlInN transistors. Excellent frequency response was obtained. The maximum fT is 86,GHz and fmax is 91.7,GHz. [source]


    Nitride-based quantum structures and devices on modified GaN substrates

    PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Issue 6 2009
    Piotr Perlin
    Abstract We have studied the properties of InGaN layers and quantum wells grown on gallium nitride substrates with intentional surface misorientation with respect to its crystalline c -axis. Misorientation varied in the range from 0 up to 2 degree. The indium content was changed by using the different growth temperature (between 750 C and 820 C) during metalorganic vapor phase epitaxy. With increasing misorientation angle the average indium content decreased significantly. This effect was accompanied by the strong increase of the emission line bandwidth suggesting more pronounced indium segregation. The results of cathodoluminescence measurements show that these effects correspond to different number of atomic steps/terraces existing on the surface of gallium nitride substrate. Very interesting result is also demonstrated concerning p-type GaN layers. With increasing misorientation, the free hole density drastically increases above 1018 cm,3. This improvement in p-type doping is not related to the increased Mg concentration but to the reduction in the compensating donor density. Using this advantage we demonstrate nitride light emitters with improved electrical properties. ( 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Optimization of InGaN/(In,Al,Ga)N based near UV-LEDs by MQW strain balancing with in-situ wafer bow sensor

    PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Issue 2 2009
    A. Knauer
    Abstract A high resolution curvature sensor was used for in-situ monitoring of the strain state during the growth of the InGaN multiple-quantum-well (MQW) for near UV light emitting diodes (LEDs). The LED heterostructures were grown by metal-organic vapor phase epitaxy. LEDs containing different Inx Al0.16Ga0.84,xN barrier layers were compared. The results were correlated with the external quantum efficiency (EQE) and the current induced shift of the emission wavelength of the LEDs. It was found that strain-compensated or slightly compressively strained Inx Al0.16Ga0.84,xN barrier layers in the MQW, for which the net polarization in the InGaN quantum wells is close to zero, result in the highest EQE and in a stable emission wavelength independent of the drive current. ( 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    On the way to InGaN quantum dots embedded into monolithic nitride cavities

    PHYSICA STATUS SOLIDI (B) BASIC SOLID STATE PHYSICS, Issue 6 2007
    K. Sebald
    Abstract We present photoluminescence measurements on single InGaN quantum dots (QDs) grown by metalorganic vapor phase epitaxy, and on monolithicly grown GaN-based quantum well airpost pillar microcavities. The observed sharp emission lines of the quantum dots are characterized by excitation density dependent measurements. The photoluminescence of individual quantum dots can easily be detected for temperatures up to 150 K. The micro-photoluminescence measurements on microcavities reveal three-dimensional confined optical modes which are not seen in the luminescence of the simply planar cavity. The realization of rather temperature stable QDs as well as of nitride based microcavity samples are promising with respect to the intended implementation of QD layers into microcavities. ( 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Evidence of different confinement regimes in site-controlled pyramidal InGaN structures

    PHYSICA STATUS SOLIDI (B) BASIC SOLID STATE PHYSICS, Issue 12 2005
    V. Prez-Solrzano
    Abstract We deposited InGaN on GaN micropyramids, which were grown by selective metal-organic vapor phase epitaxy on sapphire. We expected the formation of a quantum well on the side-walls of the pyramids, a quantum wire on the edges, and a quantum dot on its apex. We studied the emission properties of these structures using low-temperature time-resolved photoluminescence. Our measurements showed three regions of different confinement within the emission in the wavelength range between 2.12 eV and 2.40 eV. By analyzing the decay behavior, the characteristics of the luminescence was determined to originate from localized states. ( 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    The influence of aluminum composition of AlxGa1,xAs in distributed Bragg reflector on surface morphology

    PHYSICA STATUS SOLIDI (B) BASIC SOLID STATE PHYSICS, Issue 12 2004
    B. Kim
    Abstract Surface morphology of the AlGaAs/GaAs Vertical Cavity Surface Emitting Laser (VCSEL) grown by metalorganic vapor phase epitaxy (MOVPE) was investigated using atomic force microscopy. It is shown that the morphology of the structure strongly depends on the aluminum composition of the low Al content layer of distributed Bragg reflector (DBR) pairs and epi thickness. Whereas a high Al content layer in DBRs had little effect on the surface morphology, it was attributed that the influence of Al composition on the morphology of AlxGa1,xAs on GaAs was stronger in the range of 0 < x < 0.5 than 0.5 < x < 1. ( 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Growth of GaN on a -plane sapphire: in-plane epitaxial relationships and lattice parameters

    PHYSICA STATUS SOLIDI (B) BASIC SOLID STATE PHYSICS, Issue 2 2003
    T. Paskova
    Abstract We have studied GaN films grown on a -plane sapphire substrates by both hydride vapor phase epitaxy (HVPE) and metalorganic vapor phase epitaxy (MOVPE). The in-plane orientation relationships between the epitaxial films and the substrate are determined to be [11,20]GaN , [0001]sapphire and [1,100]GaN , [1,100]sapphire in the HVPE growth, while [1,100]GaN , [0001]sapphire and [11,20]GaN , [1,100]sapphire are found in the MOVPE growth. The different orientation preferences are attributed to the atom termination of the sapphire surface determined by the substrate treatment used in the different growth methods. The effect of the lattice matches on the in-plane lattice parameters and strain anisotropy in the two cases is studied. ( 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Monolithic electro-optically modulated vertical cavity surface emitting laser with 10 Gb/s open-eye operation

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 10 2010
    T. D. Germann
    Abstract A vertical-cavity surface-emitting laser with a monolithically integrated electro-optical modulator (EOM VCSEL) is fabricated using metal-organic vapor phase epitaxy. 3 dB extinction ratio of the modulator at a very low power consumption and open-eye operation of the EOM VCSEL at 10 Gb/s is demonstrated. The modulation of the 845 nm output is temperature-stable up to 85 C. ( 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Effective mass of InN estimated by Raman scattering

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 7-8 2010
    Jung Gon Kim
    Abstract We have estimated the longitudinal effective mass (m,) of electron in n-type InN films by Raman scattering. The samples were grown by MOVPE (metal organic vapor phase epitaxy) with free carrier concentration of n =6.71018 -9.91018 cm -3 according to Hall measurement. A weak Raman signal observed at ,430 cm -1 at room temperature was sharpened and shifted to higher frequency toward the A1(TO)-phonon mode at 447 cm -1 with increasing n. This mode was assigned to the lower branch (L - ) of the longitudinal-optic-phonon-plasmon-coupled (LOPC) mode. The line shape was carefully analyzed by a semi-classical line-shape fitting analysis assuming deformation potential and electro-optic coupling mechanisms for the light scattering process. A line-shape fitting analysis was conducted by adjusting three major parameters; electron density, effective mass and plasmon damping rate. The analysis well reproduced values of electron density and mobility deduced by Hall measurement. Electron effective mass of m,*/m0 = 0.05 (0.01) was also obtained as the best-fit parameter. The result agrees well with previous data obtained by other optical methods. ( 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Investigation of polarity dependent InN{0001} decomposition in N2 and H2 ambient

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue S2 2009
    R. Togashi
    Abstract The polarity dependence of decomposition of the (0001) In- and (000) N-polarity InN layers grown by hydride vapor phase epitaxy (HVPE) on freestanding GaN substrates was investigated. In flowing N2, In- and N-polarity InN layers start to decompose over 550 and 610 C, respectively. Therefore, the N-polarity InN layer is more stable than the In-polarity InN layer. On the other hand, in flowing H2, InN layers of both polarities start to react with H2 at a low temperature of 350 C leaving In droplets on the surfaces. Further more, the decomposition rate of the N-polarity InN layer is larger than that of the In-polarity InN layer below approximately 450 C, while the decomposition rate of the In-polarity InN layer is larger than that of the N-polarity InN above 450 C. An Arrhenius plot of the decomposition rates revealed that the activation energies, EA, for the decomposition reactions of In- and N- polarity InN layers are 168 and 107 kJ/mol, respectively, which are much smaller than that for GaN and AlN decomposition. ( 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Effects of initial conditions and growth temperature on the properties of nonpolar a -plane AlN grown by LP-HVPE

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue S2 2009
    Jie-Jun Wu
    Abstract AlN was grown on r - and c -plane sapphire substrates by low-pressure hydride vapor phase epitaxy (LP-HVPE). Nitridation and buffer methods were used and compared. Results show that the buffer method is appropriate for the growth of a-plane AlN. In-plane stresses were measured and found to be different in the two in-plane directions parallel and perpendicular to the AlN c -axis. In-plane stress anisotropy is reduced at high temperature leading to a smoother surface, partly owing to a decreased difference in the growth rates between two in-plane directions. However, too high a temperature decreases the crystal quality of a-plane AlN. Thus, there exists an optimal temperature range for the growth of a-plane AlN, in which improved crystal and surface qualities can both be obtained. ( 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Improvement of crystalline quality of InGaN epilayers on various crystal planes of ZnO substrate by metal-organic vapor phase epitaxy

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue S2 2009
    Yohjiro Kawai
    Abstract We demonstrated InxGa1-xN epitaxial growth with InN mole fractions of x = 0.10 to 0.23 on an m-plane ZnO substrate by metal-organic vapor phase epitaxy. The crystalline quality of the epilayers was found to be much higher than that of epilayers grown on a GaN template on an m-plane SiC substrate. The strain of the epilayers was investigated by X-ray reciprocal space mapping. ( 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Nonradiative processes at low temperature in Er,O-codoped GaAs grown by organometallic vapor phase epitaxy

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 9 2008
    A. Fujita
    Abstract Er-related photoluminescence (PL) properties have been investigated in Er,O-codoped GaAs (GaAs:Er,O) grown by organometallic vapor phase epitaxy. The GaAs:Er,O which was slightly doped with Er exhibited both strong Er-related and band-edge luminescence. In the temperature dependence of the Er-related PL intensity, the intensity decreased with increasing temperature from 4.2 K to 30 K. The temperature region was quite coincident with the region where the Carbon-related PL intensity decreased. This behaviour implies the existence of a Carbon-related nonradiative process in GaAs. ( 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Pulsed layer growth of AlInGaN nanostructures

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 6 2008
    Michael Jetter
    Abstract A pulsed layer growth mode in the metal-organic vapor phase epitaxy (MOVPE) was used to fabricate excellent quality AlInGaN nanostructures. The amount of material was varied, resulting in AlInGaN layer thicknesses between nominally 1.5 nm and 6 nm, respectively. We have analyzed the material properties by X-ray diffraction (XRD) as well as photoluminescence (PL) spectroscopy. The observed XRD-spectra and the PL intensity show the high quality of the deposited material. By analyzing the PL spectra we have found an energetic shift of the resonance lines from 2.65 eV to 3.33 eV with decreasing well thickness. We attribute this shift mainly to the presence of internal electric fields at the AlIn-GaN/GaN interface. Power-dependent and time resolved PL experiments confirm this observation. Comparing the luminescence at elevated temperatures, the pulsed layer epitaxy structures reveal a much higher intensity as the conventional grown samples. ( 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Sidewall epitaxial lateral overgrowth of nonpolar a-plane GaN by metalorganic vapor phase epitaxy

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 6 2008
    Daisuke Iida
    Abstract A major obstacle to achieving high-performance devices using nonpolar a-plane and m-plane GaN is the existence of high-density threading dislocations and stacking faults. Low-defect-density nonpolar plane GaN films were previously grown by sidewall epitaxial overgrowth using metalorganic vapor phase epitaxy [1, 2]. In this study, we control the growth-rate ratio of Ga-polar GaN to N-polar GaN by adjusting the V/III ratio. It is possible to grow GaN only from the N-face sidewall of grooves by maintaining a high V/III ratio, which reduces the number of coalescence regions on grooves and decreases the threading-dislocation density and stacking-fault density. ( 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Electrical and optical properties of thick highly doped p-type GaN layers grown by HVPE

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 6 2008
    A. Usikov
    Abstract In this paper we report 3-7 ,m thick p-GaN growth by hydride vapor phase epitaxy (HVPE) on sapphire substrates. Mg impurity was used for doping. As-grown GaN layers had p-type conductivity with concentration NA -ND up to 31019 cm,3. Mg atom concentration was varied from 1017 to 1020 cm,3. Hydrogen concentration was about 10 times less than that for Mg, which may explain effective p-type doping for as-grown GaN layers. Micro-cathodoluminescence revealed a columnar-like structure of the GaN layers with a non-uniform distribution of material regions having dominant 362 nm or 430 nm luminescence. Use of these thick p-GaN layers to grow InGaN-based blue and green LEDs by the HVPE is demonstrated. ( 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Direct MOVPE- and MBE-growth of a-plane GaN on r-plane sapphire

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 6 2008
    T. Aschenbrenner
    Abstract We report on the growth of pit-free a-plane GaN on (102) sapphire (r-plane) substrates by metal organic vapor phase epitaxy (MOVPE) using a three step growth method without low temperature nucleation layer. X-ray diffraction , -scans of the symmetric GaN (11-20) reflex revealed for 1.2 ,m thick crack- and pit-free GaN layers low FWHM of 885 arcsec and 2484 arcsec measured by inclination in c- and m-direction, respectively. To analyze the evolution growth was stopped at different stages and the samples were measured with AFM, SEM, and XRD. Furthermore, we discuss the overgrowth of MOVPE GaN layer with molecular beam epitaxy (MBE). For smooth MOVPE templates with closed surfaces the morphology was reproduced, whereas for not coalesced thinner layers a different growth mode and a smoothening of the layers occurred. We will discuss SEM- and AFMdata in detail to examine this overgrowth procedure. ( 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Optimization of underlying layer and the device structure for group-III-nitride-based UV emitters on sapphire

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 6 2008
    K. Iida
    Abstract Epitaxial lateral overgrowth (ELO) was applied for the growth of AlGaN on a sapphire substrate by metalorganic vapor phase epitaxy. Among several processes, the ELO of AlGaN on grooved AlGaN showed the best surface morphology and the lowest dark-spot density of 1108 cm,2 as measured using cathodoluminescence. The light output power of a UV LED fabricated on ELO-Al0.25Ga0.75N on grooved Al0.25Ga0.75N was the strongest among several UV LEDs fabricated by different processes. The effect of the Al composition in the electron-blocking (EB) layer on the performance of UV LEDs was investigated. The UV LED with a low-Al-content EB layer showed high output power under a low-injection condition, while the output power of a UV LED with a high-Al-content EB layer did not saturate even under a high-injection condition. ( 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    High temperature growth of AlN film by LP-HVPE

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 7 2007
    K. Tsujisawa
    Abstract AlN films were grown on AlN/sapphire templates at 1400,1500 C using low-pressure hydride vapor phase epitaxy (LP-HVPE). Compared to the step-flow growth of AlN film at 1200 C with growth rate of 2.1 ,m/h, AlN films with atomic steps were obtained at 1400,1500 C even with high growth rate. For the AlN film grown at 1450 C with growth rate of 14.3 ,m/h, the RMS value is 0.75 nm and the FWHM values of (0002) and (10-12) X-ray rocking curve (XRC) are 351 and 781 arcsec, respectively. Since the FWHM value of (10-12) XRC for the AlN/sapphire template is 1492 arcsec, the crystal quality of HVPE-grown AlN is greatly improved compared with the AlN/sapphire template, which is also confirmed by TEM observation. ( 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    The surface diffusion of Ga species on an AlGaN facet structure in low pressure MOVPE

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 7 2007
    Tetuso Narita
    Abstract The diffusion of Ga species in gas phase as well as on the surface are studied in selective area growth of AlGaN in low pressure metalorganic vapor phase epitaxy. The experiments were performed on a trapezoidal stripe with (0001) facet on the top and (1-101) facet on the sides. It was found that the ridge growth on the facets were sensitive to the growth pressure, in agreement with numerical results. At a low pressure of 100 Torr, we got a uniform thickness of AlGaN alloy, but the alloy composition was not uniform. Exponential variation of the composition gave the effective diffusion length of Ga on the order of 0.7 ,m which was independent of the growth pressure. ( 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Fabrication of thick AlN film by low pressure hydride vapor phase epitaxy

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 6 2006
    Yu-Huai Liu
    Abstract Thick AlN crystals were grown by conventional hydride vapor phase epitaxy (HVPE) on AlN/sapphire templates under low pressure (,15 Torr) at high temperature (1100 C,1200 C). Colorless, mirror-like AlN films were obtained at the growth rates of up to 20.6 ,m/h. The best root mean square (RMS) value of atomic force microscope (AFM) observations for the AlN surface was 0.19 nm in a surface of 55 ,m2. The typical values of full width half maximum (FWHM) of X-ray rocking curves for (0002) and (102) diffraction of AlN films were 173,314 arcsec and 1574,1905 arcsec, respectively. We also investigated the influences of carrier gas, growth temperature and growth rate on the crystal quality. ( 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Investigations on local Ga and In incorporation of GaInN quantum wells on facets of selectively grown GaN stripes

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 6 2006
    B. Neubert
    Abstract Multiple GaInN quantum wells (QWs) were grown on side facets with reduced piezoelectric fields (PFs) of selectively grown GaN stripes oriented along the ,100, and ,110, directions by metalorganic vapor phase epitaxy (MOVPE). The different luminescence wavelengths observed for the QWs on these facets can be explained by the reduced PFs, additionally the QW thickness depends on the facet type. Although stripes running along ,100, and ,110, develop similar triangular or trapezoidal shape, their detailed growth behaviour, electrical and luminescence properties differ significantly pointing to different adsorption/desorption and inter-facet migration processes of In, Ga and the p-type dopant Mg. ( 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Cathodoluminescence properties of InGaN codoped with Zn and Si

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 6 2006
    Y. Honda
    Abstract An InGaN alloy co-doped with Zn and Si was grown by metal organic vapor phase epitaxy on a GaN templated silicon substrate and the luminesence (CL) properties are studied by cathodoluminescence spectroscopy. As the result of co-doping of Zn and Si, the CL intensity was extremely enhanced; enhancement in the peak intensity as well as the full-width at half maximum. The optimum doping density was estimated to be N(Zn) = 4.0 x 1019/cm3 and N(Si) = 8.0 x 1018/cm3. ( 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Cathodoluminescence and electrophysical characterization of AlxGa1,xN epilayers

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 6 2006
    V. I. Kozlovsky
    Abstract Cathodoluminescence (CL) of metalorganic vapor phase epitaxy (MOVPE) grown AlxGa1,xN epilayers on sapphire has been studied with x from 0.23 to 0.38. CL spectra of undoped and Si-doped AlGaN epilayers with the same alloy composition grown on thick GaN buffers have been compared. The free electron concentration in the doped samples has been measured to (1-1.6) 1017 cm,3 with a mobility of 84-115 cm2/Vs. CL spectra have been compared with deep level transient spectroscopy spectra. ( 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Defect density dependence of luminescence efficiency and lifetimes in AlGaN active regions exhibiting enhanced emission from nanoscale compositional inhomogeneities

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 6 2006
    G. A. Garrett
    Abstract AlGaN epilayers grown by plasma-assisted molecular beam epitaxy and exhibiting high internal quantum efficiency (up to 30%) are incorporated into double-heterostructure devices grown on base layers of varying defect density. Growth of these AlGaN active layers, having increased emission from localization of carriers in regions of nanoscale compositional inhomogeneities, is found to benefit from base layers of reduced defect density, including thick AlGaN templates grown by hydride vapor phase epitaxy. Nonlinear radiative processes are observed at high optical excitation for layers grown on lower defect base layers. ( 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


    Advanced buffers for AlGaN/GaN HEMT and InGaN/GaN MQW on silicon substrates

    PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 6 2006
    Y. Dikme
    Abstract GaN growth was carried out on silicon (Si) substrates by metalorganic vapor phase epitaxy (MOVPE). A layer structure starting with HT (high-temperature) AlN and containing AlGaN and GaN as interlayers was employed for the subsequent deposition of GaN buffer layers. At first, the influence of the in-situ Al pre-deposition at the process start with different durations was investigated. Each time, the pre-deposition was followed by the same layer sequence and with thin AlGaN and GaN grown on top to form a high electron mobility transistor (HEMT). A significant enhancement could be observed in the properties of the investigated samples by reducing the pre-deposition time from 8 s to 2 s. Based on these results, multiple quantum well structures (MQW) and HEMT were grown on these buffers. For the MQW, the well thickness was increased and a shift to higher wavelengths was observed. The HEMT structures have shown enhanced properties by optimizing the growth temperatures of the top AlGaN layer. ( 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]