Sputtering Deposition (sputtering + deposition)

Distribution by Scientific Domains


Selected Abstracts


In situ Grazing Incidence Scattering Investigations During Magnetron Sputtering Deposition of FePt/Ag Thin Films (Adv. Eng.

ADVANCED ENGINEERING MATERIALS, Issue 6 2009
Mater.
The cover picture shows an grazing incidence small angle X-ray scattering pattern of a granular Ag(6nm)-FePt(7.5nm)-Ag-FePt thin film using an in-situ magnetron sputtering chamber measured directly after growth at the Beamline BM20 (ROBL) at the ESRF. The sequential deposition provides separated, faceted FePt nanoislands without any magnetic property degradation and with magnetic moments preferentially oriented parallel to layer surface. The central part of the picture was blocked by a beam stop to avoid an over-saturation of the CCD detector. More details can be found in the article by Jörg Grenzer et al. on page 478. [source]


In situ Grazing Incidence Scattering Investigations During Magnetron Sputtering Deposition of FePt/Ag Thin Films,

ADVANCED ENGINEERING MATERIALS, Issue 6 2009
Valentina Cantelli
Using in situ synchrotron X-ray grazing incidence scattering experiments we investigated FePt islands mediated by Ag. FePt has been deposited by DC-magnetron sputtering on amorphous Si/SiO2 substrate at 400,°C, to support the formation of the hard ferromagnetic L10 -FePt phase during growth. The sequential Ag/FePt deposition provides separated FePt nanoislands without magnetic property degradation. We obtained magnetic moments preferentially oriented parallel to layer surface. [source]


Plasma Sputtering Deposition of PEMFC Porous Carbon Platinum Electrodes,

FUEL CELLS, Issue 2 2008
H. Rabat
Abstract A novel method is proposed to fabricate the active catalytic layers of proton exchange membrane fuel cells (PEMFC). A plasma sputtering technique is used to deposit a porous columnar carbon film (column diameter of 20,nm) followed by the catalyst (platinum) deposition directly on the proton-conducting membrane. The study of Pt diffusion shows that the optimised catalysed layers correspond to low plasma pressure operation (0.5,Pa) below a platinum loading limit of about 90,,g,cm,2. The initial carbon porosity is then maintained and Pt nanoparticles are present in all parts of the carbon layer. A membrane electrode assembly (MEA) is then achieved by alternate depositions of carbon and platinum onto both sides of the membrane. The results show the importance of the porous carbon structure. A significant increase in the catalyst efficiency is observed compared to a commercial fuel cell when measuring open circuit voltage. [source]


Helicon-wave-excited plasma sputtering deposition of Ga-doped ZnO transparent conducting films

PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Issue 11 2006
Mutsumi Sugiyama
Abstract Sputtering deposition of Ga-doped ZnO (ZnO:Ga) thin films was carried out using the helicon-wave-excited plasma sputtering (HWPS) method. The films sputtered above 150 °C had a preferential {0001} orientation. According to the surface-damage-free nature, the films having featureless surface morphology exhibited an optical transmittance greater than 80% in the visible spectral wavelengths. However, because the deposition temperature was limited to 250 °C, the electron mobility was limited to as low as 2,3 cm2/V s due to the small grain size (,25 nm). The results indicate that ZnO:Ga films deposited by HWPS can be used in the transparent conducting oxide layer, provided that higher electron mobility is achieved. (© 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]


Proximity magnetoresistance in Ag70Fe30 and Ag74Fe26 cosputtered granular films

PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Issue 12 2004
P. Allia
Abstract Granular films of composition Ag70Fe30 and Ag74Fe26 were prepared by dc plasma sputtering deposition in Ar atmosphere on Si substrates. Magnetization and magnetoresistance were measured between 2 K and 270 K. Both films exhibit a negative magnetoresistance (MR). The MR vs. reduced magnetisation curves are characterised by a box-like behavior, as already observed in magnetic systems with competing interactions. A standard analysis indicates that in both systems individual Fe nanoparticles are magnetically correlated over large distances. (© 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [source]